1 PANalytical MPD for thin film analysis (LMC)
PANalytical MPD for thin film analysis
PANalytical X'Pert Pro MPD (multi-purpose diffractometer) primarily for thin film analysis using grazing incidence geometry (e.g. phase analysis, microstructure). Set-up changeable to Bragg-Brentano geometry and sample spinner for powder diffraction.
» GIXRD with parallel beam
- depth-resolved thin film analysis
» Bragg-Brentano geometry (BB, Theta-2Theta) with parafocusing beam
- qualitative stress analysis of thin films
- powder X-ray diffraction
» X-ray reflectometry (XRR)
- determination of layer thickness, surface roughness and density
» Equipment
- X-ray mirror for parallel beam and suppression both of Cu K-beta and continuous radiation
- fixed divergence slit for focusing beam
- hybrid monochromator for monochromatic (Cu K-alpha1) parallel beam
- infrared (IR) sample stage for large sample dimensions and additional build-ups
- rotatable sample stage for powder specimens
- programmable XYZ sample stage utilizable for lateral scans and as automatic sample changer
- PIXcel line detetctor
- Xe point detector with parallel plate collimator