1 PANalytical MPD for thin film analysis (LMC)

PANalytical MPD for thin film analysis

PANalytical X'Pert Pro MPD (multi-purpose diffractometer) primarily for thin film analysis using grazing incidence geometry (e.g. phase analysis, microstructure). Set-up changeable to Bragg-Brentano geometry and sample spinner for powder diffraction.

» GIXRD with parallel beam

  • depth-resolved thin film analysis

» Bragg-Brentano geometry (BB, Theta-2Theta) with parafocusing beam

  • qualitative stress analysis of thin films
  • powder X-ray diffraction

» X-ray reflectometry (XRR)

  • determination of layer thickness, surface roughness and density

» Equipment

  • X-ray mirror for parallel beam and suppression both of Cu K-beta and continuous radiation
  • fixed divergence slit for focusing beam
  • hybrid monochromator for monochromatic (Cu K-alpha1) parallel beam
  • infrared (IR) sample stage for large sample dimensions and additional build-ups
  • rotatable sample stage for powder specimens
  • programmable XYZ sample stage utilizable for lateral scans and as automatic sample changer
  • PIXcel line detetctor
  • Xe point detector with parallel plate collimator

PANalytical X'Pert Pro MPD in PT005

PANalytical X'Pert Pro MPD in PT005

Left: GIXRD setup with programmable XYZ sample stage. Right: Lateral mapping of a CZTSe absorber thin film.

Left: GIXRD setup with programmable XYZ sample stage. Right: Lateral mapping of a CZTSe absorber thin film.

Left: GIXRD setup with IR sample stage. Right: Depth-resolved measurement of a CISe thin film absorber layer.

Left: GIXRD setup with IR sample stage. Right: Depth-resolved measurement of a CISe thin film absorber layer.

Left: Theta-2Theta setup with focusing optics and reflection-transmission spinner for powder specimens. Right: Diffraction pattern of a LaB6 reference powder specimen.

Left: Theta-2Theta setup with focusing optics and reflection-transmission spinner for powder specimens. Right: Diffraction pattern of a LaB6 reference powder specimen.