Development of diffractive optics for high-resolution X-ray imaging

In-house research of the microscopy group

• Electrodynamic theory of volume zone plates
• Nano-technology of Fresnel zone plates (e-beam lithography and pattern transfer into high aspect ratio zone structures with minimal line widths below 20 nm)
• In-house development of X-ray objectives for the soft and multi-keV photon energy range
• Development of phase contrast objectives
• Characterization of the imaging performance of diffractive optical elements at wavelength
• Simulations of the imaging process for 3D X-ray microscopy methods
• Operation of an advanced 100 keV electron beam lithography system with high precision overlay accuracy