Mirrors, Gratings and Crystals are the basis of soft x-ray optics and technology. We measure routinely the quality of our beamline optical elements, the reflectivity of our mirrors, the efficiency of our gratings and the scattering properties of our ultrasmooth surfaces. The characterisation of their at-wavelength performance is the decisive test drive for optical elements. For multilayer mirrors this at-wavelength metrology is an essential part of the production and optimisation process.
Our UHV-reflectometer is permanently coupled to the optics beamline - a soft x-ray beamline with rapid access. The reflectometer is a multipurpose instrument to determine the optical properties of samples in transmission or reflection. The reflectivity can be determined at a fixed photon energy as function of the incidence angle or vice versa as function of the energy for a certain incidence angle. The samples can have any size from a few square millimeters to macroscopic optical elements.
A new instrument allowing for larger samples (<360 mm x 60 mm), for measurements in s- and p-polarisation geometry and more versatility in sample alignment is in the designing and construction phase. It will be ready end of 2012.
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