Scanning electron microscopy
Four scanning electron microscopes are available which are equipped with various analysis options such as energy dispersive X-ray spectroscopy (EDX), electron backscatter diffraction (EBSD), electron beam induced current (EBIC), cathodoluminescence (CL) and atomic force microscope (AFM).
Zeiss Merlin (LMC)
- 0,8 nm resolutiona at 15kV 1,4nm at 1kV
- 20V-30kV accelerating voltage
- InLens (SE) for Detector for Secondary electron detection on the optical axis
- InLens (EsB) for energy selective backscattered electron detection for stronger material contrasts
- SE2 detector
- AFM : Extends the capabilities of the SEM to the abolition of atomic layers and the study of surface magnetism or local conductivity
- Transfer system for air sensitive samples
- Planned 2022/2023: EDX system
Zeiss Merlin (WCRC)
- 0,8 nm resolutiona at 15kV 1,4nm at 1kV
- 20V-30kV accelerating voltage
- InLens (SE) for Detector for Secondary electron detection on the optical axis
- InLens (EsB) for energy selective backscattered electron detection for stronger material contrasts
- SE2 detector
- EDX System Ultim Extreme by Oxford
Zeiss UltraPlus (LMC)
- SE und BSE Detectoren
- Charge-compensation und Polishing System
- EBSD/EDX System AZtec von Oxford Instruments
- EBIC System (point electronic)
- CL System (EMSystems)
LEO Gemini 1530 (LMC)
- SE detectors
- EDX system by Thermo Fisher