Scanning electron microscopy
Four scanning electron microscopes are available which are equipped with various analysis options such as energy dispersive X-ray spectroscopy (EDX), electron backscatter diffraction (EBSD), electron beam induced current (EBIC), cathodoluminescence (CL) and atomic force microscope (AFM).
![Zeiss Merlin](/media/media/forschung/corelabs/correlative-microscopy-spectroscopy/rem/instrumentpic-merlin.jpg)
Zeiss Merlin (LMC)
- 0,8 nm resolutiona at 15kV 1,4nm at 1kV
- 20V-30kV accelerating voltage
- InLens (SE) for Detector for Secondary electron detection on the optical axis
- InLens (EsB) for energy selective backscattered electron detection for stronger material contrasts
- SE2 detector
- AFM : Extends the capabilities of the SEM to the abolition of atomic layers and the study of surface magnetism or local conductivity
- Transfer system for air sensitive samples
- Planned 2022/2023: EDX system
![Zeiss Merlin Adlershof](/media/media/forschung/corelabs/correlative-microscopy-spectroscopy/rem/instrumentpic-merlin-adlershof.png)
Zeiss Merlin (WCRC)
- 0,8 nm resolutiona at 15kV 1,4nm at 1kV
- 20V-30kV accelerating voltage
- InLens (SE) for Detector for Secondary electron detection on the optical axis
- InLens (EsB) for energy selective backscattered electron detection for stronger material contrasts
- SE2 detector
- EDX System Ultim Extreme by Oxford
![Zeiss UltraPlus](/media/media/forschung/corelabs/correlative-microscopy-spectroscopy/rem/instrumentpic-ultra.jpg)
Zeiss UltraPlus (LMC)
- SE und BSE Detectoren
- Charge-compensation und Polishing System
- EBSD/EDX System AZtec von Oxford Instruments
- EBIC System (point electronic)
- CL System (EMSystems)
![LEO Gemini 1530](/media/media/forschung/corelabs/correlative-microscopy-spectroscopy/rem/instrumentpic-leo.jpg)
LEO Gemini 1530 (LMC)
- SE detectors
- EDX system by Thermo Fisher