Publikationen 2017

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  Eggenstein, F.; Krivenkov, M.; Rudolph, I.; Sertsu, M.G.; Sokolov, A.; Varykhalov, A.; Wolf, J.; Zeschke, Th.; Schäfers, F.: Investigation of HF-plasma-treated soft x-ray optical elements. In: Lahsen Assoufid ... [Ed.] : Advances in Metrology for X-Ray and EUV Optics VIIBellingham, Washington: SPIE, 2017 (Proceedings of SPIE ; 10385). - ISBN 978-1-51061-227-3, p. 10385-1-7
  doi: 10.1117/12.2272967