Höflich, K.; Jurczyk, J.M.; Madajska, K.; Götz, M.; Berger, L.; Guerra-Nuñez, C.; Haverkamp, C.; Szymanska, I.; Utke, I.: Towards the third dimension in direct electron beam writing of silver. Beilstein Journal of Nanotechnology 9 (2018), p. 842-849
10.3762/bjnano.9.78
Open Access Version
Abstract:
Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell time dependent deposition behavior and growth characteristics. While silver 2,2-dimethylbutyrate showed a strong depletion in the center of the impinging electron beam profile hindering any vertical growth, silver pentafluoropropionate indicated a pronounced dependency of the deposit height on the dwell time. Truly three-dimensional silver structures could be realized with silver pentafluoropropionate. The pillars displayed a polycrystalline habit with silver contents of more than 50 at.% and strong Raman enhancement constituting a promising route towards direct electron beam writing of three-dimensional plasmonic device parts from the gas phase.