Feng, Y.; Huang, Q.; Zhuang, Y.; Sokolov, A.; Lemke, S.; Qi, R.; Zhang, Z.; Wang, Z.: Mo/Si lamellar multilayer gratings with high efficiency and enhanced resolution for the x-ray region of 1000-1700eV. Optics Express 29 (2021), p. 13416-13427
10.1364/OE.422483
Open Access Version
Abstract:
The d-spacing of the multilayer lamellar grating was theoretically optimized to improve the energy resolution and maintain a high efficiency. Based on the study of the growth behavior of Mo/Si multilayer on the lamellar grating under different sputtering pressures, Ar gas pressure of 1 mTorr was selected, which can fabricate the multilayer with lower roughness and a good replication of the groove shape. An absolute diffraction efficiency of 25.6% and a Cff factor of 1.79 were achieved for the -1st order of the Mo/Si lamellar multilayer grating at an energy of 1700 eV.