• Siewert, F.; Buchheim, J.; Gwalt, G.; Viefhaus, J.: On the characterization of ultra-precise XUV-focusing mirrors by means of slope-measuring deflectometry. In: Lahsen Assoufid, Haruhiko Ohashi, Anand Asundi [Ed.] : Advances in Metrology for X-Ray and EUV Optics VIII : 11-12 August 2019, San Diego, California, United StatesBellingham, Wash., 2019 (Proceedings of SPIE ; 11109). - ISBN 978-1-5106-2912-7, p. 111090N/1-11


Slope-measuring deflectometry allows the non-contact measurement of curved surfaces such as ultra-precise elliptical cylindrical mirrors used for the focusing of synchrotron light. This paper will report on the measurement of synchrotron mirrors designed to guide and focus synchrotron light in the variable polarization beamline P04 at the PETRA III synchrotron at DESY (Hamburg). These mirrors were optimized by deterministic finishing technology based on topography data provided by slope-measuring deflectometry. We will show the results of the mirror inspection and discuss the expected beamline performance by ray-tracing results.