Muydinov, R.; Steigert, A.; Schönau, S.; Ruske, F.; Kraehnert, R.; Eckhardt, B.; Lauermann, I.; Szyszka, B.: Water-assisted nitrogen mediated crystallisation of ZnO films. Thin Solid Films 590 (2015), p. 177-183
10.1016/j.tsf.2015.07.034
Abstract:
Nitrogen mediated crystallisation (NMC) being performed in oxygen atmosphere at T ≥600 °C is an effective approach to obtain very well (00l)-textured ZnO films. A use of NMC-seed layers remarkably improves electrical transport properties of subsequently deposited ZnO:Al contacts. In thiswork, crystallisation of quasi-amorphous, nitrogen doped ZnO seed layers has been performed using water vapours at overpressure and temperatures around 100 °C. This approach allows employment of soda-lime float-glass or temperature sensitive film stacks as a substrate. We propose here possible mechanism of water-assisted NMC and grope for optimised crystallisation conditions on the basis of optical, microscopic, and textural investigation. Low temperature water-assisted crystallisation of 20 nm thick ZnO layers was compared with high temperature annealing methods in terms of composition, microstructure and crystallinity. Electrical properties such as electron Hallmobility (μe), concentration of free electrons (Ne) and sheet resistance (Rsh) have been evaluated and compared for functional ZnO:Al films obtained on glass and on differently crystallised NMC-seed layers. It was found that the crystallised withwater assistance at lowtemperature ZnO seed layers provide comparable improvement in crystallinity and electrical properties of subsequently grown functional ZnO:Al films with respect to the ones crystallised at high temperature. Use of optimised water-assisted crystallisation of seed layers has allowed decreasing Rsh of thin (130–270 nm) functional ZnO:Al films twice compared to the glass substrate. Both provide this effect: increase in μe and increase of Ne.