• Yandayan, T.; Geckeler, R.; Siewert, F.: Pushing the limits - latest developments in angle metrology for the inspection of ultra-precise synchrotron optics. In: Lahsen Assoufid ... [Ed.] : Advances in metrology for x-ray and EUV optics V : 18 August 2014, San Diego, California, United States Bellingham, Wash.: SPIE, 2014 (Proceedings of SPIE ; 9206). - ISBN 978-1-62841-233-8, p. 92060F/1-15

10.1117/12.2060953
Open Access Version