Didden, A.; Hillebrand, P.; Wollgarten, M.; Dam, B.; van de Krol, R.: Deposition of conductive TiN shells on SiO2 nanoparticles with a fluidized bed ALD reactor. Journal of Nanoparticle Research 18 (2016), p. 35/1-11
10.1007/s11051-016-3343-z
Open Access Version (externer Anbieter)