Muydinov, R.; Ruske, F.; Neubert, S.; Steigert, A.; Klaus, M.; Selve, S.; Köppel, G.; Szyszka, B.: Combination of nitrogen mediated crystallisation with post-deposition annealing - Towards ultra-thin ZnO:Al contacts. Thin Solid Films 589 (2015), p. 750-754
10.1016/j.tsf.2015.07.012