• Herrero, A.; Pflüger, M.; Probst, J.; Scholze, F.; Soltwisch, V.: Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings. Optics Express 27 (2019), p. 32490-32507

10.1364/OE.27.032490
Open Access Version