EMIL

Cleanroom

The EMIL cleanroom is equipped for carrying out wet chemical processes (texturing, cleaning), exclusively on silicon wafers of size 4" round up to 156 mm edge length (texturing up to 166 mm edge length). Several laminar flow wet benches are available for this purpose, in which cleaning processes can be carried out using RCA cleaning or ozone cleaning, as well as texturing (etching of random pyramids) in KOH solutions. The appropriate chemicals are available for these processes. An optical microscope is available for process control.

The EMIL cleanroom is open to users who wish to carry out the above-mentioned processes. This requires an extensive training phase prior to any experiment.

Figure 1: The clean room at EMIL lab: a) laminar flow wet benches; b) ozone cleaning vats; c) RCA cleaning vats; d) optical microscope