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EMIL Infrastructure
OVERVIEW EMIL INFRASTRUCTURE
EMIL Beamline
UE48 soft X-ray branch
U17 hard X-ray branch
Performance Data
SISSY-off SR and UHV Backbone
Thermoelectric Sputtertool
Cluster Desposition Tool
Glovebox Preparation
UHV-Preparation
ALD Tool
High-pressure reactor
Organic evaporator/ e-beam systems
EMIL Endstations
SISSY I
SISSY I Technical Information
OAESE
Ambient pressure XES
CAT
vP-XAS
MYSTIIC
PINK
Ancillary facilities
Chemistry Laboratory
Users agreements
Clean Room
Characterisation Laboratory
EMIL
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EMIL Infrastructure
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EMIL
EMIL Infrastructure
EMIL Beamline
Introduction
UE48 soft X-ray branch
U17 hard X-ray branch
EMIL Endstations
SISSY I
OAESE
CAT
MYSTIIC
PINK
EMIL Ancillary Infrastructure
Overview: Ancillary facilities
Sample Characterization Laboratory (SCALA)
Clean Room
Chemical Laboratory
SISSY off-Synchrotron/UHV Backbone
Sample Preparation Systems
Sputter tool
Cluster tool
ALD tool
organic evaporator/ e-beam systems
High-pressure reactor
Glove Box
