Sieber, I. ; Urban, I. ; Schubert-Bischoff, P.: The epitaxial growth of sputtered silicon layers on differently oriented substrates at low temperature - An electron microscopic study. Journal of Non-Crystalline Solids 353 (2007), p. 2550-2556
10.1016/j.jnoncrysol.2007.04.027
Abstract:
The epitaxial growth of sputtered silicon layers on differently oriented substrates at low temperature – An electron microscopic study