Repmann, T. ; Wieder, S. ; Klein, S. ; Müller, J. ; Kilper, T. ; Stiebig, H. ; Rech, B.: Production equipment for amorphous and microcrystalline silicon solar cell manufacturing. In: Poortman, J. [u.a.] [Eds.] : Twentyfirst European Photovoltaic Solar Energy Conference : proceedings of the international conference held in Dresden, Germany, 4 - 8 September 2006 München: WIP Renewable Energies, 2006. - ISBN 3-936338-20-5, p. 1590-1593
Abstract:
Production equipment fopr amorphous and microcrystalline silicon solar cell manufacturing