Fernandez Herrero, A.; Pflüger, M.; Puls, J.; Scholze, F.; Soltwisch, V.: Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. Optics Express 29 (2021), p. 35580-35591
10.1364/OE.430416
Open Access Version (externer Anbieter)
