Methods

Fabrication

  • Chemical vapor deposition (CVD)
  • Atomic layer deposition (ALD)

Nanopatterning

  • Reactive ion etching (RIE)
  • Focused-ion beam (FIB)
  • Electron-beam-induced deposition (EBID)
  • Chemical synthesis

Optoelectronic analyses

  • Combined micro- and macro-Raman spectroscopy
  • Photoluminescence spectroscopy
  • Time-resolved photoluminescence and fs-ms photoconductivity
  • Ellipsometry
  • Absorption/scattering
  • Quantum efficiency

Advanced correlative scanning electron and probe microscopy

  • Electron backscatter diffraction (EBSD)
  • Energy-dispersive X-ray spectrometry (EDX)
  • Electron-beam-induced current (EBIC)
  • Cathodoluminescence (CL)
  • X-ray photoelectron spectroscopy
  • Raman spectroscopy
  • Atomic force microscopy
  • UNIVSEM
  • FIBLYS
  • Electron Microscopy Group